JPH01167334U - - Google Patents
Info
- Publication number
- JPH01167334U JPH01167334U JP6175388U JP6175388U JPH01167334U JP H01167334 U JPH01167334 U JP H01167334U JP 6175388 U JP6175388 U JP 6175388U JP 6175388 U JP6175388 U JP 6175388U JP H01167334 U JPH01167334 U JP H01167334U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- exhaust
- processing
- double
- chamber forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
Landscapes
- Prevention Of Fouling (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988061753U JPH0437625Y2 (en]) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988061753U JPH0437625Y2 (en]) | 1988-05-11 | 1988-05-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01167334U true JPH01167334U (en]) | 1989-11-24 |
| JPH0437625Y2 JPH0437625Y2 (en]) | 1992-09-03 |
Family
ID=31287401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988061753U Expired JPH0437625Y2 (en]) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437625Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020175315A (ja) * | 2019-04-16 | 2020-10-29 | ヤマト科学株式会社 | ドラフトチャンバおよびドラフトチャンバの風量制御方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS559119U (en]) * | 1978-06-30 | 1980-01-21 | ||
| JPS59135133U (ja) * | 1983-02-26 | 1984-09-10 | 株式会社大氣社 | 隔離作業用キヤビネツト |
| JPS62105447U (en]) * | 1985-12-23 | 1987-07-06 |
-
1988
- 1988-05-11 JP JP1988061753U patent/JPH0437625Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS559119U (en]) * | 1978-06-30 | 1980-01-21 | ||
| JPS59135133U (ja) * | 1983-02-26 | 1984-09-10 | 株式会社大氣社 | 隔離作業用キヤビネツト |
| JPS62105447U (en]) * | 1985-12-23 | 1987-07-06 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020175315A (ja) * | 2019-04-16 | 2020-10-29 | ヤマト科学株式会社 | ドラフトチャンバおよびドラフトチャンバの風量制御方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437625Y2 (en]) | 1992-09-03 |